JPS6255341U - - Google Patents
Info
- Publication number
- JPS6255341U JPS6255341U JP14760785U JP14760785U JPS6255341U JP S6255341 U JPS6255341 U JP S6255341U JP 14760785 U JP14760785 U JP 14760785U JP 14760785 U JP14760785 U JP 14760785U JP S6255341 U JPS6255341 U JP S6255341U
- Authority
- JP
- Japan
- Prior art keywords
- hot plate
- photoresist
- coated
- semiconductor substrate
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14760785U JPS6255341U (en]) | 1985-09-26 | 1985-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14760785U JPS6255341U (en]) | 1985-09-26 | 1985-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6255341U true JPS6255341U (en]) | 1987-04-06 |
Family
ID=31061121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14760785U Pending JPS6255341U (en]) | 1985-09-26 | 1985-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6255341U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01168026A (ja) * | 1987-12-23 | 1989-07-03 | Teru Kyushu Kk | ベーキング装置 |
| JPH07161632A (ja) * | 1993-07-16 | 1995-06-23 | Semiconductor Syst Inc | 基板コーティング／現像システム用熱処理モジュール |
-
1985
- 1985-09-26 JP JP14760785U patent/JPS6255341U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01168026A (ja) * | 1987-12-23 | 1989-07-03 | Teru Kyushu Kk | ベーキング装置 |
| JPH07161632A (ja) * | 1993-07-16 | 1995-06-23 | Semiconductor Syst Inc | 基板コーティング／現像システム用熱処理モジュール |
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